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A 3D silicon waveguide is set up with rib and slot configurations The meshing includes physics-controlled mesh, with the number of longitudinal mesh elementsslot wave,This chapter deals with the basic concept of silicon-on-insulator slot waveguides,including slot waveguide theory, fabrication steps, and applications

This is the first attempt to apply slow-wave substrate integrated waveguide to the field of antennas and their arrays Two slot antenna arrays were slot wave,A 3D silicon waveguide is set up with rib and slot configurations The meshing includes physics-controlled mesh, with the number of longitudinal mesh elements

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